YERLANULY, Y.; AYAGANOV, Z. Y.; NEMKAYEVA, R. R. .; UTEGENOV, A. U. .; RAMAZANOV, T. S. .; GABDULLIN, M. T. . Effect of nitrogen concentration on titanium nitride thin film formation. International Journal of Mathematics and Physics, [S. l.], v. 14, n. 2, p. 49–55, 2023. DOI: 10.26577/ijmph.2023.v14.i2.06. Disponível em: https://ijmph.kaznu.kz/index.php/kaznu/article/view/702. Acesso em: 22 dec. 2024.