Computer modeling of radiation processes in solids is under ion irradiation
of the spectra of primary sputtered atoms (PSA) and the concentration of radiation-induced defects. Presented CPF calculation algorithm is based on the number of interactions and the depth of particle penetration. The models calculate the spectra of primary sputtered atoms and the concentration of radiation defects in materials irradiated by different ions. This takes into account the atomic weight of the incident particle and the target, all options are: atomic weight of the incoming particle is less than the atomic number of the target, the atomic weight of the incoming particle is commensurate with target atomic number, atomic weight of the incoming particle larger atomic number of the target. The regularities of the behavior concentration of radiation defects.
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